Takano Particle
Inspection Tools
Non-Pattern Wafer Surface Inspection System
- Spiral Scan with high resolution XY-position
- Cost effective performance and high sensitivity results to inspect particles for 8” wafer.
- Using the latest Window 10 OS operation interface
- Using semiconductor laser light source, long laser life can reduce running cost
- WM-7S can detect all the actual particle numbers on the wafer through the Real method, and can also set the Pixel method
- Throughput: 55WPH at 0.10um sensitivity
- Maximum detection sensitivity (Bare Si) 0.079um
