EUVTECH Measurement Tools
Major developer of EUV metrology solutions and market leader in creating at-wavelength EUV tools, EUV Tech possesses the knowledge base, experience and expertise to provide in-house measurement services for those products.
EUV Tech’s measurement capabilities include, but are not limited to:
- EUV reflectivity measurements
- EUV transmission measurements
- EUV scatterometry measurements
- EUV N&K, phase, thickness and spectral response measurements
Sample form factors include photomasks, pellicles, thin films, wafers, coupons and optics.
