Aqusen In-situ Air Leak Monitoring System
Continuously monitors air concentration and uploads data to the FDC system. To reduce equipment downtime and increase equipment performance to reduce yield loss.
Satellite-Air Features:
- An cost effective and compact sensor
- Measurement range：1E-26 ppm ~ 100% of air.
- Working Range: 1E-7 Torr ~ 760 Torr
- Differential pumping station is not required
- Plug and play, replaceable sensor head
- Long sensor head life time, typically 17,500 hours in clean gases.
- Can combine with H2O sensor for moisture monitor
